Author: González Díaz-Palacio, I.
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TUPOTK013 PEALD SIS Studies for SRF Cavities 1222
SUSPMF107   use link to see paper's listing under its alternate paper code  
 
  • I. González Díaz-Palacio, R.H. Blick, A. Stierle, R. Zierold
    University of Hamburg, Hamburg, Germany
  • W. Hillert, M. Wenskat
    University of Hamburg, Institut für Experimentalphysik, Hamburg, Germany
  • A. Jeromin
    DESY Nanolab, FS-NL, Hamburg, Germany
  • T.F. Keller, N. Krupka, M. Wenskat
    DESY, Hamburg, Germany
 
  Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution.  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK013  
About • Received ※ 09 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 27 June 2022
Cite • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)  
 
TUPOTK016 HiPIMS-Coated Novel S(I)S Multilayers for SRF Cavities 1234
 
  • A.Ö. Sezgin, X. Jiang, M. Vogel
    University Siegen, Siegen, Germany
  • I. González Díaz-Palacio, R. Zierold
    University of Hamburg, Hamburg, Germany
  • S. Keckert, J. Knobloch, O. Kugeler, D.B. Tikhonov
    HZB, Berlin, Germany
  • J. Knobloch
    University of Siegen, Siegen, Germany
  • R. Ries, E. Seiler
    Slovak Academy of Sciences, Institute of Electrical Engineering, Bratislava, Slovak Republic
 
  Funding: Material syntheses and characterizations via SMART, BMBF, Germany (05K19PSA). Superconducting characterizations via iFAST, H2020, EU (101004730). Part of this work via the MNaF, University of Siegen.
Pushing beyond the existing bulk niobium SRF cavities is indispensable along the path towards obtaining more sustainable next generation compact particle accelerators. One of the promising candidates to push the limits of the bulk niobium is thin film-based multilayer structures in the form of superconductor-insulator-superconductor (SIS). In this work, S(I)S multilayer structures were coated by high power impulse magnetron sputtering (HiPIMS), having industrial upscaling potential along with provid-ing higher quality films with respect to conventional magnetron sputtering techniques (e.g., DCMS), combined with (PE)-ALD techniques for deposition of the ex-situ insulating layers. On the path towards formulating opti-mized recipes for these materials to be coated on the inner walls of (S)RF cavities, the research focuses on innovat-ing the best performing S(I)S multilayer structures con-sisting of alternating superconducting thin films (e.g., NbN) with insulating layers of metal nitrides (e.g., AlN) and/or metal oxides (e.g., AlxOy) on niobium lay-ers/substrates (i.e., Nb/AlN/NbN) in comparison to the so-called SS multilayer structures (i.e., Nb/NbN). This con-tribution presents the initial materials and superconduct-ing and RF characterization results of the aforementioned multilayer systems on flat samples.
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK016  
About • Received ※ 11 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 18 June 2022
Cite • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)