Paper | Title | Page |
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TUPOTK013 | PEALD SIS Studies for SRF Cavities | 1222 |
SUSPMF107 | use link to see paper's listing under its alternate paper code | |
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Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution. | ||
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK013 | |
About • | Received ※ 09 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 27 June 2022 | |
Cite • | reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml) | |
TUPOTK016 | HiPIMS-Coated Novel S(I)S Multilayers for SRF Cavities | 1234 |
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Funding: Material syntheses and characterizations via SMART, BMBF, Germany (05K19PSA). Superconducting characterizations via iFAST, H2020, EU (101004730). Part of this work via the MNaF, University of Siegen. Pushing beyond the existing bulk niobium SRF cavities is indispensable along the path towards obtaining more sustainable next generation compact particle accelerators. One of the promising candidates to push the limits of the bulk niobium is thin film-based multilayer structures in the form of superconductor-insulator-superconductor (SIS). In this work, S(I)S multilayer structures were coated by high power impulse magnetron sputtering (HiPIMS), having industrial upscaling potential along with provid-ing higher quality films with respect to conventional magnetron sputtering techniques (e.g., DCMS), combined with (PE)-ALD techniques for deposition of the ex-situ insulating layers. On the path towards formulating opti-mized recipes for these materials to be coated on the inner walls of (S)RF cavities, the research focuses on innovat-ing the best performing S(I)S multilayer structures con-sisting of alternating superconducting thin films (e.g., NbN) with insulating layers of metal nitrides (e.g., AlN) and/or metal oxides (e.g., AlxOy) on niobium lay-ers/substrates (i.e., Nb/AlN/NbN) in comparison to the so-called SS multilayer structures (i.e., Nb/NbN). This con-tribution presents the initial materials and superconduct-ing and RF characterization results of the aforementioned multilayer systems on flat samples. |
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DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK016 | |
About • | Received ※ 11 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 18 June 2022 | |
Cite • | reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml) | |