JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Sezgin, A.Ö. AU - González Díaz-Palacio, I. AU - Jiang, X. AU - Keckert, S. AU - Knobloch, J. AU - Kugeler, O. AU - Ries, R. AU - Seiler, E. AU - Tikhonov, D.B. AU - Vogel, M. AU - Zierold, R. ED - Zimmermann, Frank ED - Tanaka, Hitoshi ED - Sudmuang, Porntip ED - Klysubun, Prapong ED - Sunwong, Prapaiwan ED - Chanwattana, Thakonwat ED - Petit-Jean-Genaz, Christine ED - Schaa, Volker R.W. TI - HiPIMS-Coated Novel S(I)S Multilayers for SRF Cavities J2 - Proc. of IPAC2022, Bangkok, Thailand, 12-17 June 2022 CY - Bangkok, Thailand T2 - International Particle Accelerator Conference T3 - 13 LA - english AB - Pushing beyond the existing bulk niobium SRF cavities is indispensable along the path towards obtaining more sustainable next generation compact particle accelerators. One of the promising candidates to push the limits of the bulk niobium is thin film-based multilayer structures in the form of superconductor-insulator-superconductor (SIS). In this work, S(I)S multilayer structures were coated by high power impulse magnetron sputtering (HiPIMS), having industrial upscaling potential along with provid-ing higher quality films with respect to conventional magnetron sputtering techniques (e.g., DCMS), combined with (PE)-ALD techniques for deposition of the ex-situ insulating layers. On the path towards formulating opti-mized recipes for these materials to be coated on the inner walls of (S)RF cavities, the research focuses on innovat-ing the best performing S(I)S multilayer structures con-sisting of alternating superconducting thin films (e.g., NbN) with insulating layers of metal nitrides (e.g., AlN) and/or metal oxides (e.g., AlxOy) on niobium lay-ers/substrates (i.e., Nb/AlN/NbN) in comparison to the so-called SS multilayer structures (i.e., Nb/NbN). This con-tribution presents the initial materials and superconduct-ing and RF characterization results of the aforementioned multilayer systems on flat samples. PB - JACoW Publishing CP - Geneva, Switzerland SP - 1234 EP - 1237 KW - SRF KW - cavity KW - niobium KW - target KW - cathode DA - 2022/07 PY - 2022 SN - 2673-5490 SN - 978-3-95450-227-1 DO - doi:10.18429/JACoW-IPAC2022-TUPOTK016 UR - https://jacow.org/ipac2022/papers/tupotk016.pdf ER -