JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{gonzalezdiaz-palacio:ipac2022-tupotk013,
author = {I. González Díaz-Palacio and R.H. Blick and W. Hillert and A. Jeromin and T.F. Keller and N. Krupka and A. Stierle and M. Wenskat and R. Zierold},
% author = {I. González Díaz-Palacio and R.H. Blick and W. Hillert and A. Jeromin and T.F. Keller and N. Krupka and others},
% author = {I. González Díaz-Palacio and others},
title = {{PEALD SIS Studies for SRF Cavities}},
booktitle = {Proc. IPAC'22},
% booktitle = {Proc. 13th International Particle Accelerator Conference (IPAC'22)},
pages = {1222--1225},
eid = {TUPOTK013},
language = {english},
keywords = {cavity, SRF, site, plasma, niobium},
venue = {Bangkok, Thailand},
series = {International Particle Accelerator Conference},
number = {13},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2022},
issn = {2673-5490},
isbn = {978-3-95450-227-1},
doi = {10.18429/JACoW-IPAC2022-TUPOTK013},
url = {https://jacow.org/ipac2022/papers/tupotk013.pdf},
abstract = {{Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution.}},
}