JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Gupta, D. AU - Aggarwal, S. AU - Singhal, R. AU - Umapathy, G.R. ED - Zimmermann, Frank ED - Tanaka, Hitoshi ED - Sudmuang, Porntip ED - Klysubun, Prapong ED - Sunwong, Prapaiwan ED - Chanwattana, Thakonwat ED - Petit-Jean-Genaz, Christine ED - Schaa, Volker R.W. TI - Ripple Pattern Formation on Silicon Carbide Surfaces by Low-Energy Ion-Beam Erosion J2 - Proc. of IPAC2022, Bangkok, Thailand, 12-17 June 2022 CY - Bangkok, Thailand T2 - International Particle Accelerator Conference T3 - 13 LA - english AB - A versatile air insulated high current medium energy 200 kV Ion Accelerator has been running successfully at Ion Beam Centre, Kurukshetra University, India for carrying out multifarious experiments in material science and surface physics. Ion beam induced structures on the surfaces of semiconductors have potential applications in photonics, magnetic devices, photovoltaics, and surface-wetting tailoring etc. In this regard, silicon carbide (SiC) is a fascinating wide-band gap semiconductor for high-temperature, high-power and high-frequency applications. In the present work, fabrication of self-organized ripple patterns is carried out on the SiC surfaces using 80 keV Ar+ ions for different fluences at oblique incidence of 500. Studies demonstrate that ripple wavelength and amplitude, ordering and homogeneity of these patterns vary linearly with argon ion fluence. The ripples tend to align themselves parallel to the projection of the ion beam direction. The evolution of such surface structures is explained with the help of existing formalisms of coupling between surface topography and preferential sputtering. PB - JACoW Publishing CP - Geneva, Switzerland SP - 3045 EP - 3048 DA - 2022/07 PY - 2022 SN - 2673-5490 SN - 978-3-95450-227-1 DO - doi:10.18429/JACoW-IPAC2022-THPOMS037 UR - https://jacow.org/ipac2022/papers/thpoms037.pdf ER -